(1) Process gas control equipment
A: Gas supply equipment GC for toxic decay and explosion
Hisptech type fully automatic special gas cabinet is used for toxic, corrosive, and explosive gases, with fully automatic touch screen operation (with external blowing, vacuuming, automatic emergency remote cut-off, accident alarm, high-pressure pressure maintaining steel cylinder joint leakage detection, leakage alarm docking, ventilation outlet, etc.)
B: Terminal gas control equipment
Histotech type VMB, equipped with automatic emergency remote cut-off, vacuum pumping, external blowing, leak alarm docking, ventilation outlet, etc
(2) Gas pipeline transportation system
The pipeline needs to be safely arranged according to the current situation of the entire building and the comprehensive situation of clean room construction and decoration, and scientifically distributed to the designated equipment in the clean room according to the actual needs of the corresponding process equipment. The layout of pipelines must use safe and necessary double-layer sleeves (the inner layer tube is a clean polished EP grade tube, the middle tube is vacuum sealed, and the outer layer is a BA grade tube) with vacuum pumping and vacuum monitoring in the middle. All pipes and valve components must use internationally renowned EP grade materials
(3) Exhaust gas treatment system
Provide Hisptech electric thermal decomposition+polymer WET scrubber, using ultra-high temperature jacket decomposition and ultra-high pressure water molecule adsorption treatment methods, with a treatment efficiency of ≥ 99.999%
